Newsletter January 2007

LAMBDA SX 540C, new 308 nm high power Excimer laser

Dear Excimer Laser User,

Processing with deep ultraviolet laser light has proven to be a unique, enabling technology for a wide variety of industrial processes.  Coherent is committed to an ongoing program of continuous product improvement aimed at increasing the performance and lowering the cost of excimer lasers, in order to bring the unique benefits of UV materials processing to an ever expanding array of applications.  Our new LAMBDA SX 540C Excimer laser represents the latest benchmark in this program. 

The LAMBDA SX 540C is a high power, 308 nm Excimer laser specifically targeted at high-throughput manufacturing applications.  It is notable as being the first industrial-grade Excimer laser to combine both high pulse energy (up to 0.9 J) and a high pulse repetition rate (up to 600 Hz).  This repetition rate is twice that of earlier models, which translates directly into higher process throughput.

This new laser incorporates all the advantages of the existing LAMBDA SX class as well as several important innovations.  For example, actively stabilized performance can be achieved at pulse energies anywhere between 700 and 900 mJ, enabling the laser output and operating costs to be optimized for specific applications needs.  The laser also features burst mode with PowerLok for “power on demand” applications, an all solid state pulser for high reliability, and an external resonator design for maximum beam stability.  Plus, the use of TimeLok technology ensures accurate triggering and time jitter reduction.  In addition, with the LAMBDA SX 540C laser, Coherent introduces an enhanced software interface for improved real time control, greater ease of use, optimized maintenance scheduling, and even remote e-diagnostics

The LAMBDA SX series is s designed to deliver the lowest cost per ultraviolet W/h (Watt/hour) for a wide range of demanding, high duty cycle, industrial processing tasks.  These include high throughput micromachining and surface treatment for a variety of plastics and glass materials, structuring of Transparent Conductive Oxides (e.g. ITO, ZnO), direct patterning of thin metal films on flexible plastic substrates, thin film annealing, and reel-to-reel Pulsed Laser Deposition (PLD).  To facilitate integration, all LAMBDA SX lasers can be combined with Coherent’s MicroLas standard or custom beam delivery optical systems to yield a spatial resolution as small as 2 microns at the work surface in these applications.

Please visit our web site at www.coherent.com for more detailed information on the LAMBDA SX 540C, or contact our technical sales department at +39 02 34530214. 

                         
Founded in 1966, Coherent, Inc. is a Standard & Poor's SmallCap 600 company and a world leader in providing laser-based solutions to the commercial and scientific research markets. 

Coherent Italia
Via Borgese, 14
20154 Milano
Tel. +39 02 34 530 214
Fax +39 02 34 934 165
E-mail: coherent.italia@coherent.com

07.09.2010 - http://www.coherent.it/newsletter-archiv/newsletter-january-2007-lambda-sx-540c-high-power-excimer-laser/